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Process-induced distortion prediction and feedforward and feedback correction of overlay errors |
Pradeep Vukkadala, Haiguang Chen, Sathish Veeraraghavan |
2019-09-03 |
| 10379061 |
Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool |
Haiguang Chen, Sergey Kamensky, Sathish Veeraraghavan, Pradeep Vukkadala |
2019-08-13 |
| 10352691 |
Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool |
Haiguang Chen, Shouhong Tang, Sergey Kamensky |
2019-07-16 |
| 10330608 |
Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology tools |
Haiguang Chen, Sergey Kamensky |
2019-06-25 |
| 10249523 |
Overlay and semiconductor process control using a wafer geometry metric |
Pradeep Vukkadala, Sathish Veeraraghavan |
2019-04-02 |