Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10352691 | Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool | Haiguang Chen, Jaydeep Sinha, Sergey Kamensky | 2019-07-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10352691 | Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool | Haiguang Chen, Jaydeep Sinha, Sergey Kamensky | 2019-07-16 |