Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10379061 | Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool | Haiguang Chen, Jaydeep Sinha, Sathish Veeraraghavan, Pradeep Vukkadala | 2019-08-13 |
| 10352691 | Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool | Haiguang Chen, Jaydeep Sinha, Shouhong Tang | 2019-07-16 |
| 10330608 | Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology tools | Haiguang Chen, Jaydeep Sinha | 2019-06-25 |