Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10435787 | Hydrogen partial pressure control in a vacuum process chamber | Hari Ponnekanti | 2019-10-08 |
| 10187966 | Method and apparatus for gas abatement | Rongping Wang, Jibing Zeng, David Muquing HOU, Michael S. Cox, Zheng Yuan | 2019-01-22 |