Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10211030 | Source RF power split inner coil to improve BCD and etch depth performance | Ruizhe Ren, Jon C. Farr, Chethan Mangalore, Peter DEMONTE, Parthiban Balakrishna | 2019-02-19 |
| 10187966 | Method and apparatus for gas abatement | Jibing Zeng, David Muquing HOU, Michael S. Cox, Zheng Yuan, James L'HEUREUX | 2019-01-22 |
| 10176973 | Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Michael S. Cox, Brian T. West, Roger M. Johnson, Colin John Dickinson | 2019-01-08 |