Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10449486 | Plasma abatement of compounds containing heavy atoms | Michael S. Cox, Monique McIntosh, Paul Fisher, Yutaka Tanaka, Zheng Yuan | 2019-10-22 |
| 10176973 | Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Michael S. Cox, Rongping Wang, Brian T. West, Roger M. Johnson | 2019-01-08 |