Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10464498 | Quick access ATV mounted bow carrier | — | 2019-11-05 |
| 10449486 | Plasma abatement of compounds containing heavy atoms | Monique McIntosh, Colin John Dickinson, Paul Fisher, Yutaka Tanaka, Zheng Yuan | 2019-10-22 |
| 10344375 | Gas cooled substrate support for stabilized high temperature deposition | Brian T. West, Jeonghoon Oh | 2019-07-09 |
| 10332773 | Transparent electrostatic carrier | Leung Kway Lee, Pallavi Zhang | 2019-06-25 |
| 10236201 | Wafer carrier for smaller wafers and wafer pieces | Cheryl Knepfler | 2019-03-19 |
| 10187966 | Method and apparatus for gas abatement | Rongping Wang, Jibing Zeng, David Muquing HOU, Zheng Yuan, James L'HEUREUX | 2019-01-22 |
| 10176973 | Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson | 2019-01-08 |