Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10211030 | Source RF power split inner coil to improve BCD and etch depth performance | Rongping Wang, Ruizhe Ren, Jon C. Farr, Peter DEMONTE, Parthiban Balakrishna | 2019-02-19 |
CM
Chethan Mangalore
Overall (2019): #510,230 of 560,194Top 95%
1
Patents 2019