Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10424461 | Controlling ion energy within a plasma chamber | Thorsten Lill, Harmeet Singh, Alex Paterson | 2019-09-24 |
| 10224221 | Internal plasma grid for semiconductor fabrication | Harmeet Singh, Thorsten Lill, Vahid Vahedi, Alex Paterson, Monica Titus | 2019-03-05 |