Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10428441 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Theresa Kramer Guarini, Jeffrey Tobin, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2019-10-01 |
| 10211046 | Substrate support ring for more uniform layer thickness | Heng Pan, Lara Hawrylchak | 2019-02-19 |
| 10199221 | Cleaning method | Peter Stone, Teng-Fang Kuo, Ping Han Hsieh, Manoj Vellaikal | 2019-02-05 |