Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10344375 | Gas cooled substrate support for stabilized high temperature deposition | Michael S. Cox, Jeonghoon Oh | 2019-07-09 |
| 10176973 | Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Michael S. Cox, Rongping Wang, Roger M. Johnson, Colin John Dickinson | 2019-01-08 |