Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10177014 | Thermal radiation barrier for substrate processing chamber components | Govinda Raj, Daniel L. Martin, Robert T. Hirahara, Bopanna Vasanth, Prashanth Rao +1 more | 2019-01-08 |
| 10168229 | EMI/RF shielding of thermocouples | Govinda Raj, Bopanna Ichettria Vasantha, Cariappa Baduvamanda | 2019-01-01 |