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Microelectronic conductive routes and methods of making the same |
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Selective gate spacers for semiconductor devices |
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Bottom-up selective dielectric cross-linking to prevent via landing shorts |
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Materials and deposition schemes using photoactive materials for interface chemical control and patterning of predefined structures |
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Image tone-reversal with a dielectric using bottom-up cross-linking for back end of line (BEOL) interconnects |
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Selective deposition utilizing sacrificial blocking layers for semiconductor devices |
Grant Kloster, Scott B. Clendenning, Szuya S. Liao, Patricio E. Romero, Florian Gstrein |
2019-03-26 |