| 10504681 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +2 more |
2019-12-10 |
| 10460905 |
Backscattered electrons (BSE) imaging using multi-beam tools |
Mark A. McCord, Richard R. Simmons, Doug K. Masnaghetti |
2019-10-29 |
| 10366862 |
Method and system for noise mitigation in a multi-beam scanning electron microscopy system |
Doug K. Masnaghetti, Richard R. Simmons, Mark A. McCord |
2019-07-30 |
| 10354831 |
Charged particle inspection method and charged particle system |
Thomas Kemen, Stefan Schubert |
2019-07-16 |
| 10325753 |
Method and system for focus adjustment of a multi-beam scanning electron microscopy system |
Doug K. Masnaghetti, Richard R. Simmons, Scott A. Young, Mark A. McCord |
2019-06-18 |
| 10192716 |
Multi-beam dark field imaging |
Doug K. Masnaghetti, Mark A. McCord, Richard R. Simmons |
2019-01-29 |
