Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490519 | Pattern decomposition lithography techniques | Charles H. Wallace, Hossam A. Abdallah, Swaminathan Sivakumar, Oleg Golonzka, Robert M. Bigwood | 2019-11-26 |
| 10409152 | Pattern decomposition lithography techniques | Charles H. Wallace, Hossam A. Abdallah, Swaminathan Sivakumar, Oleg Golonzka, Robert M. Bigwood | 2019-09-10 |
| 10211088 | Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects | Charles H. Wallace, Paul A. Nyhus, Swaminathan Sivakumar | 2019-02-19 |
| 10204830 | Previous layer self-aligned via and plug patterning for back end of line (BEOL) interconnects | Charles H. Wallace, Paul A. Nyhus, Swaminathan Sivakumar | 2019-02-12 |