Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10347491 | Forming recombination centers in a semiconductor device | Wolfgang Jantscher, Oliver Blank, Petra Fischer, Ravi Keshav Joshi, Kurt Pekoll +5 more | 2019-07-09 |
| 10199255 | Method for providing a planarizable workpiece support, a workpiece planarization arrangement, and a chuck | Ingo Muri, Bernhard Goller, Christian Grindling | 2019-02-05 |