Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199255 | Method for providing a planarizable workpiece support, a workpiece planarization arrangement, and a chuck | Ingo Muri, Alexander Binter, Bernhard Goller | 2019-02-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199255 | Method for providing a planarizable workpiece support, a workpiece planarization arrangement, and a chuck | Ingo Muri, Alexander Binter, Bernhard Goller | 2019-02-05 |