Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10393798 | Integrated electro-optical module assembly | Paul S. Andry, Qianwen Chen, Bing Dang, John U. Knickerbocker, Minhua Lu +1 more | 2019-08-27 |
| 10166632 | In-situ laser beam position and spot size sensor and high speed scanner calibration, wafer debonding method | Russell A. Budd, Paul S. Andry | 2019-01-01 |