Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10304744 | Inverse tone direct print EUV lithography enabled by selective material deposition | Ekmini Anuja De Silva, Fee Li Lie, Stuart A. Sieg, Yann Mignot, Indira Seshadri | 2019-05-28 |