Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453720 | Method of manufacturing semiconductor device | Takashi Yahata, Tadashi Takasaki, Naofumi Ohashi, Shun MATSUI, Keita ICHIMURA | 2019-10-22 |
| 10403478 | Plasma processing apparatus and method of manufacturing semiconductor device | Hidehiro Yanai, Shin Hiyama, Toshiya Shimada | 2019-09-03 |