Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403478 | Plasma processing apparatus and method of manufacturing semiconductor device | Hidehiro Yanai, Toshiya Shimada, Yukinori Aburatani | 2019-09-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403478 | Plasma processing apparatus and method of manufacturing semiconductor device | Hidehiro Yanai, Toshiya Shimada, Yukinori Aburatani | 2019-09-03 |