Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403478 | Plasma processing apparatus and method of manufacturing semiconductor device | Shin Hiyama, Toshiya Shimada, Yukinori Aburatani | 2019-09-03 |
| 10287684 | Substrate processing apparatus | — | 2019-05-14 |