Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453720 | Method of manufacturing semiconductor device | Yukinori Aburatani, Tadashi Takasaki, Naofumi Ohashi, Shun MATSUI, Keita ICHIMURA | 2019-10-22 |
| 10184177 | Substrate processing apparatus capable of adjusting flow rate of inert gas supplied to substrate | — | 2019-01-22 |