Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10415136 | Substrate processing apparatus including heating and cooling device, and ceiling part included in the same | Tetsuya Kosugi, Masaaki Ueno | 2019-09-17 |
| 10340151 | Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device | Tetsuya Kosugi, Masaaki Ueno, Hitoshi Murata | 2019-07-02 |
| 10228291 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA | 2019-03-12 |