Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475652 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yukitomo HIROCHI | 2019-11-12 |
| 10418293 | Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support | Tetsuya Kosugi, Masaaki Ueno | 2019-09-17 |
| 10228291 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Tetsuya Kosugi, Tokunobu Akao, Atsushi UMEKAWA, Motoya Takewaki | 2019-03-12 |