Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10415136 | Substrate processing apparatus including heating and cooling device, and ceiling part included in the same | Motoya Takewaki, Tetsuya Kosugi | 2019-09-17 |
| 10418293 | Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support | Hideto Yamaguchi, Tetsuya Kosugi | 2019-09-17 |
| D860419 | Electric furnace for substrate processing apparatus | Tetsuya Kosugi, Hitoshi Murata | 2019-09-17 |
| D860420 | Electric furnace for substrate processing apparatus | Tetsuya Kosugi, Hitoshi Murata | 2019-09-17 |
| 10340151 | Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device | Tetsuya Kosugi, Motoya Takewaki, Hitoshi Murata | 2019-07-02 |