Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D860419 | Electric furnace for substrate processing apparatus | Tetsuya Kosugi, Masaaki Ueno | 2019-09-17 |
| D860420 | Electric furnace for substrate processing apparatus | Tetsuya Kosugi, Masaaki Ueno | 2019-09-17 |
| 10340151 | Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device | Tetsuya Kosugi, Motoya Takewaki, Masaaki Ueno | 2019-07-02 |