Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312053 | Charged particle beam apparatus, alignment method of charged particle beam apparatus, alignment program, and storage medium | Kazuki ISHIZAWA, Hiroyuki Chiba, Daichi Nara | 2019-06-04 |
| 10176968 | Method for adjusting charged particle beam device and adjusting beam aperture based on a selected emission condition and charged particle beam device for same | Kunji Shigeto, Mitsugu Sato, Tsutomu Saito, Kohtaro Hosoya, Tohru Ando | 2019-01-08 |