Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453650 | Charged particle beam apparatus, observation method using charged particle beam apparatus, and program | Yoshinobu Hoshino, Shigeru Kawamata | 2019-10-22 |
| 10312053 | Charged particle beam apparatus, alignment method of charged particle beam apparatus, alignment program, and storage medium | Kazuki ISHIZAWA, Yoshihiro Takahoko, Daichi Nara | 2019-06-04 |