Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10176968 | Method for adjusting charged particle beam device and adjusting beam aperture based on a selected emission condition and charged particle beam device for same | Mitsugu Sato, Tsutomu Saito, Kohtaro Hosoya, Yoshihiro Takahoko, Tohru Ando | 2019-01-08 |