Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472567 | Compositions and methods for selectively etching titanium nitride | Li-Min Chen, Emanuel I. Cooper, Lingyan Song, Chia-Jung Hsu, Sheng-Hung Tu +1 more | 2019-11-12 |
| 10460954 | Anti-reflective coating cleaning and post-etch residue removal composition having metal, dielectric and nitride compatibility | Emanuel I. Cooper, Lingyan Song | 2019-10-29 |
| 10428271 | Compositions and methods for selectively etching titanium nitride | Emanuel I. Cooper, Li-Min Chen, Chia-Jung Hsu, Sheng-Hung Tu, Chieh-Ju Wang | 2019-10-01 |
| 10392560 | Compositions and methods for selectively etching titanium nitride | Jeffrey A. Barnes, Emanuel I. Cooper, Li-Min Chen, Rekha Rajaram, Sheng-Hung Tu | 2019-08-27 |