Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10392560 | Compositions and methods for selectively etching titanium nitride | Emanuel I. Cooper, Li-Min Chen, Steven Lippy, Rekha Rajaram, Sheng-Hung Tu | 2019-08-27 |
| 10347504 | Use of non-oxidizing strong acids for the removal of ion-implanted resist | Steven M. Bilodeau, Emanuel I. Cooper, Jaeseok Lee, WonLae Kim | 2019-07-09 |
| 10340150 | Ni:NiGe:Ge selective etch formulations and method of using same | Steven M. Bilodeau, Emanuel I. Cooper, Hsing-Chen Wu, Sheng-Hung Tu, Thomas Parson +1 more | 2019-07-02 |
| 10176979 | Post-CMP removal using compositions and method of use | Jun Liu, Emanuel I. Cooper, Laisheng Sun, Elizabeth THOMAS, Jason Y.H. Chang | 2019-01-08 |