Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472567 | Compositions and methods for selectively etching titanium nitride | Li-Min Chen, Emanuel I. Cooper, Steven Lippy, Chia-Jung Hsu, Sheng-Hung Tu +1 more | 2019-11-12 |
| 10460954 | Anti-reflective coating cleaning and post-etch residue removal composition having metal, dielectric and nitride compatibility | Emanuel I. Cooper, Steven Lippy | 2019-10-29 |