Showing 1–5 of 5 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Tadahiro Ishizaka | Tokyo Electron Limited | 5 |
| 2 | Toshio Hasegawa | Tokyo Electron Limited | 2 |
| 2 | Atsushi Gomi | Tokyo Electron Limited | 2 |
| 2 | Reiji Niino | Tokyo Electron Limited | 2 |
| #5 | Genji Nakamura | Tokyo Electron Limited | 1 |
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