Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481498 | Droplet generator for lithographic apparatus, EUV source and lithographic apparatus | Johan Frederik Dijksman, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Koen Gerhardus Winkels, Theodorus Wilhelmus Driessen, Georgiy O. Vaschenko +4 more | 2019-11-19 |