Issued Patents 2019
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10180628 | Method of determining critical-dimension-related properties, inspection apparatus and device manufacturing method | Hugo Augustinus Joseph Cramer, Henricus Johannes Lambertus Megens, Maurits Van Der Schaar, Te-Chih Huang | 2019-01-15 |
| 10180629 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more | 2019-01-15 |