Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480064 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Antti Niskanen, Han Wang, Qi Xie, Jan Willem Maes +4 more | 2019-11-19 |
| 10468251 | Method for forming spacers using silicon nitride film for spacer-defined multiple patterning | Dai Ishikawa, Atsuki Fukazawa | 2019-11-05 |
| D864134 | Susceptor | Yozo Ikedo, Takuya Suguri | 2019-10-22 |