Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468262 | Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures | Katja Väyrynen, Mikko Ritala | 2019-11-05 |
| 10468261 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Katja Väyrynen, Mikko Ritala | 2019-11-05 |
| 10358407 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Miika Mattinen, Mikko Ritala | 2019-07-23 |
| 10344378 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Jaakko Niinisto, Mikko Ritala, Suvi Haukka | 2019-07-09 |
| 10319588 | Method for depositing a metal chalcogenide on a substrate by cyclical deposition | Miika Mattinen, Mikko Ritala | 2019-06-11 |
| 10308673 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Timo Hatanpää, Mikko Ritala | 2019-06-04 |
| 10208379 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Timo Hatanpää, Mikko Ritala | 2019-02-19 |