Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10358407 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2019-07-23 |
| 10319588 | Method for depositing a metal chalcogenide on a substrate by cyclical deposition | Mikko Ritala, Markku Leskelä | 2019-06-11 |