Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10358407 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Miika Mattinen, Mikko Ritala, Markku Leskelä | 2019-07-23 |
| 10344378 | Precursors and methods for atomic layer deposition of transition metal oxides | Jaakko Niinisto, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2019-07-09 |
| 10308673 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2019-06-04 |
| 10208379 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2019-02-19 |