Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468261 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Mikko Ritala, Markku Leskelä | 2019-11-05 |
| 10468262 | Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures | Mikko Ritala, Markku Leskelä | 2019-11-05 |