Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522371 | Systems and methods for improved semiconductor etching and component protection | Lok Kee Loh, Dmitry Lubomirsky, Soonwook Jung, Martin Yue Choy, Soonam Park | 2019-12-31 |
| 10504754 | Systems and methods for improved semiconductor etching and component protection | Lok Kee Loh, Dmitry Lubomirsky, Soonwook Jung, Martin Yue Choy, Soonam Park | 2019-12-10 |
| 10297458 | Process window widening using coated parts in plasma etch processes | Dongqing Yang, Peter M. Hillman, Lala Zhu, Nitin K. Ingle, Dmitry Lubomirsky +2 more | 2019-05-21 |