Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147633 | Transfer apparatus and plasma processing system | Shinji Himori, Etsuji Ito | 2018-12-04 |
| 9857687 | Method of manufacturing substrate and substrate and mask film | Kazunori Tsuge, Yoshihito Tanaka, Koji Akiyama, Kiyoshi Tanaka, Kazuyoshi Nishio +6 more | 2018-01-02 |
| 9859146 | Semiconductor manufacturing device and processing method | Shinji Himori, Yoshiyuki Kobayashi, Etsuji Ito | 2018-01-02 |