Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147633 | Transfer apparatus and plasma processing system | Takehiro Kato, Etsuji Ito | 2018-12-04 |
| 10032611 | Connection control method | Norikazu Yamada, Takeshi Ohse | 2018-07-24 |
| 9978566 | Plasma etching method | Akihiro Yokota, Tatsuro Ohshita, Shu Kusano, Etsuji Ito, Kazuya Nagaseki | 2018-05-22 |
| 9859146 | Semiconductor manufacturing device and processing method | Yoshiyuki Kobayashi, Takehiro Kato, Etsuji Ito | 2018-01-02 |