Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10147633 | Transfer apparatus and plasma processing system | Shinji Himori, Takehiro Kato | 2018-12-04 |
| 9978566 | Plasma etching method | Akihiro Yokota, Shinji Himori, Tatsuro Ohshita, Shu Kusano, Kazuya Nagaseki | 2018-05-22 |
| 9859146 | Semiconductor manufacturing device and processing method | Shinji Himori, Yoshiyuki Kobayashi, Takehiro Kato | 2018-01-02 |