Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9926462 | Composition for forming liquid immersion upper layer film, and polymer | Kazunori Kusabiraki, Takahiro Hayama, Motoyuki Shima | 2018-03-27 |
| 9857687 | Method of manufacturing substrate and substrate and mask film | Kazunori Tsuge, Yoshihito Tanaka, Koji Akiyama, Kazuyoshi Nishio, Takehiro Kato +6 more | 2018-01-02 |