Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10023827 | Cleaning composition for semiconductor substrate and cleaning method | Kenji Mochida | 2018-07-17 |
| 9926462 | Composition for forming liquid immersion upper layer film, and polymer | Kiyoshi Tanaka, Kazunori Kusabiraki, Takahiro Hayama | 2018-03-27 |