Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128137 | Management method of substrate processing apparatus and substrate processing system | Satoshi Morita, Ryoji Ikebe, Isamu Miyamoto | 2018-11-13 |
| 10046372 | Liquid processing apparatus | Kazuya Goda, Nobuya Yamamoto, Go Ayabe | 2018-08-14 |
| 9895711 | Substrate liquid processing apparatus, substrate liquid processing method and substrate processing apparatus | Jian Zhang, Eiichiro Okamoto, Yuki Ito | 2018-02-20 |
| 9859136 | Substrate processing apparatus and substrate processing method | Hiromitsu Namba, Fitrianto, Yoichi Tokunaga | 2018-01-02 |