Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10046372 | Liquid processing apparatus | Kazuya Goda, Yoshifumi Amano, Nobuya Yamamoto | 2018-08-14 |
| 10043692 | Substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport program | Kouji Takuma | 2018-08-07 |