YT

Yoichi Tokunaga

TL Tokyo Electron Limited: 1 patents #241 of 733Top 35%
Overall (2018): #180,676 of 503,207Top 40%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9859136 Substrate processing apparatus and substrate processing method Hiromitsu Namba, Fitrianto, Yoshifumi Amano 2018-01-02